Whether thin-film ablation, microstructuring, lift-off for microLEDs, membrane thinning, or via-hole arrays – our excimer systems (157–308 nm wavelengths) enable high-precision processing using mask projection and line beam techniques. Our maximum duty-cycle solutions stand out for excellent beam shaping, high precision, and flexible process control, making them ideal for demanding industrial and research applications. They are used worldwide, e.g., in the display, semiconductor, medical, and sensor industries. In our application lab, we work closely with customers to develop tailored processes, produce prototypes, and provide series production when needed. That is how we create customized machine solutions for industrial microprocessing.

We look forward to discussing your requirements!