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SPIE.Photonics West 2027Products & Services Multilayer Piezo Actuator Stacks - CuX Series

Multilayer Piezo Actuator Stacks - CuX Series

Exhibitor
piezosystem jena GmbH

CuX Multilayer Piezo Actuator Stacks – High Performance, Extended Lifetime & High-Volume Availability

The CuX series from piezosystem jena offers high-performance multilayer piezoelectric actuators designed for precision positioning, optical alignment, semiconductor manufacturing, and demanding industrial applications.

Featuring innovative copper inner electrodes and optimized PZT ceramic technology, CuX stacks deliver up to 20% greater stroke, displacement of up to 55 µm, blocking forces of up to 2,600 N, and operating voltages from -10 to 180 V.

Engineered for exceptional durability, CuX stacks offer improved humidity resistance, high-temperature stability, and extended service life, with endurance testing demonstrating up to 1 billion cycles at 170°C.

Their compact design, fast response, and high force density make them ideal for precision optical adjustment, active stabilization, semiconductor wafer alignment, lithography, and advanced automation.

With high-volume availability, short delivery times for standard configurations, and customized OEM integration support, CuX stacks provide a reliable, cost-effective solution for next-generation precision motion systems.

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