TRITOR 100 – High-Precision 3-Axis Piezo Nanopositioning Stage for PIC Alignment

The TRITOR 100 is a compact, high-performance three-axis piezo nanopositioning stage designed for precision optical alignment, photonic integrated circuit (PIC) testing, and fiber-to-chip coupling. Offering a motion range of up to 100 µm per axis, resolution down to 0.2 nm in open-loop operation, and frictionless flexure guidance, it delivers exceptional positioning accuracy, stability, and dynamic performance.

Optimized for high-speed fiber-to-chip alignment, the TRITOR 100 SG, combined with the NV 40/3 CLE controller, enables rapid optical coupling optimization in automated wafer-level testing. In a demonstrated industrial application, the system achieved spiral scans in approximately 0.8 seconds and complete dual-sided fiber alignment in approximately 5 seconds per test site, supporting efficient, high-throughput PIC testing.

Its integrated strain-gauge sensors enable position-referenced scanning, combining open-loop speed with accurate position feedback. The compact design and flexible controller integration make the TRITOR 100 an ideal solution for silicon photonics, optical packaging, semiconductor testing, and advanced photonics manufacturing.