MLase MLI excimer lasers are designed as compact, high-stability systems with clearly specified operating parameters. Standardization of core performance characteristics enables reliable integration, predictable operation, and consistent results across different applications and environments. Typical system characteristics:

• Pulse energies up to 16 mJ

• Repetition rates up to 1000 Hz

• High pulse stability below 2 %

• Flexible cooling concepts

• Continuous operation capabilities

• Compact footprint