SPIE.Photonics West 2024German Exhibitors Osiris International GmbH
Osiris International GmbH

Osiris International GmbH

Booth number: 4205-68
www.osiris-nano.eu

About us

Osiris International is a manufacturer of machines specializing in photolithographic process equipment used in semiconductor and microsystems (MEMS) technology.

The main application areas for surface treatment of wafers, substrates or masks are the following processing applications.

  • Photoresist spin & spray coating, developing, baking
  • Wet cleaning, post CMP cleaning, etching, stripping & metal lift-off
  • Temporary bonding & debonding.

In addition to the production of our machines, which range from laboratory systems to semi-automatic and fully automatic systems, we also offer sub-systems such as PR Dispense Systems (Pumps or Syringes) and media supply cabinets with various canister designs.

We supply our technologies worldwide to major semiconductor manufacturers and internationally renowned research and development institutions.

Address

Osiris International GmbH
Josef-Schüttler-Str. 2
78224 Singen Htw.
Germany

Phone:  +49 7731 169950

CHEMIXX-SERIES

WET PROCESSING
Semi- or fully-automatic production systems.

Designed to be used in applications:
WET CLEANING, ETCHING, POST CMP CLEAN AND METAL LIFT-OFF

VARIXX-SERIES

Resist Processing
Automatic production systems.

Designed to be used in applications:
SPIN (SPRAY) COATING, DEVELOPING, BAKING & COOLING AND EBR

UNIXX-SERIES

Semi-automatic production systems.
Spin & spray coater, developer, temperature and smartEBR modules are available as stand-alone, table-top or bench mounted configurations.

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