SPIE.Photonics West 2024German Exhibitors CiS Forschungsinstitut für Mikrosensorik GmbH

CiS Forschungsinstitut für Mikrosensorik GmbH

Booth number: 4205-05
www.cismst.de

About us

The CiS Forschungsinstitut für Mikrosensorik GmbH is a research institution with about 120 employees and is one of the leading institutes for the development of high-quality, silicon-based microsensors and microsystems, especially in the fields of MEMS and MOEMS.

Together with its partners from research and industry, the CiS Research Institute creates new innovations for the technical challenges of our time. Silicon-based sensors are the main focus of our research and development tasks for industry and science. Starting with application-specific design, process development, assembly and connection technology up to the precisely fitting solution, including comprehensive measurement technology and analytics, our portfolio presents the entire value chain. Our focus is on long-term stability, precision and high reliability of the sensors. Building on 30 years of “Competence in Silicon”, our expertise ranges from R&D services to small series production of customer-specific micro components.


We are hiring:
Development engineer for optical sensors

Headquarter of CiS Forschungsinstitut in Erfurt, Germany

A glance in our wafer fab. Here: Process plant for chemical vapour deposition

Wire bonding on stacked sensor chips

Thermopile array with thermal isolation of its segments within the active areas

3D structured photo diode array for measuring the angle of incoming light

Semi-transparent photodiodes and tandem photo diodes

Chip level galvanic isolation, photo diode line detector with > 1500 V isolation between segments

Photo diode with through hole for stray light and back scattered light sensing along a optical axis

Silicon strain gauges for measuring forces, momentum and pressure related deformation of its carrier

Silicon pressure sensor with high temperature stability and linear characteristic curve

Address

CiS Forschungsinstitut für Mikrosensorik GmbH
Konrad-Zuse-Str. 14
99099 Erfurt
Germany

Phone:  +49 3616 631410

Contact person:

Dr. Martin Schädel
Business Unit manager MOEMS
E-mail: mschaedel@cismst.de
Phone: +49 3616 631410

Products & Services

Sensor Technology
Science and Research

Together with its partners from research and industry, the CiS Research Institute creates new innovations for the technical challenges of our time.

Silicon-based sensors are the main focus of our research and development tasks for industry and science. Starting with application-specific design, process development, assembly and connection technology up to the precisely fitting solution, including comprehensive measurement technology and analytics, our portfolio presents the entire value chain. Our focus is on long-term stability, precision and high reliability of the sensors. In two business units we focus on mechanical sensing technologies (pressure, force, strain, …) and optical sensor systems (for high energy radiation, photodiodes, infrared detectors and light sources…).

Based on 30 years of "Competence in Silicon", our expertise includes R&D services, prototyping as well as small series production of customized micro components.

Avalanche photo diode (APD) with optimized sensitivity for UV and blue light

Due to internal amplification of the APD a gain of factor > 100 for the output signal can be achieved. The sensor technology is optimized for a peak sensitivity at 400 nm wavelength and covers the range of 250 to 600 nm.

Avalanche photo diode (APD) with optimized sensitivity for UV and blue light

Highly dynamic MEMS infrared (IR) emitters as light source in IR-based sensing systems

These thermally emitting devices cover the wavelength range from 2 to 15 µm. The optical output power per die is in the range of several 10 to some 100 mW with operating frequencies up to 100 Hz – depending on chip size and design. Arrays of such emitters allow even higher power and contain the high dynamic behaviour.

Highly dynamic MEMS infrared (IR) emitters as light source in IR-based sensing systems

Customer specific photo diode (arrays)

For UV, visible and near infrared we offer customised photodiodes and arrays. Our technology allows any geometry for chip edges and active areas. Vias, tilted local areas and different surface levels can be achieved within a single chip, allowing a high variability of customized solutions.

Customer specific photo diode (arrays)

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