Piezo solutions for the semiconductor, photonics, and aerospace industries. Our technology is suited for positioning and scanning tasks, generating high forces and frequencies.
piezosystem jena (PSJ) is a worldwide developer and manufacturer of high-precision piezo equipment. PSJ has a strong focus to create customized solutions for industrial and research applications. Through its more than 30 years of existence, PSJ has worked together with leading OEMs in the fields of semiconductor, photonics, metrology, aerospace, and the automotive industry. Together with our customers, we have developed systems that can achieve extreme levels of precision, high force generation, or stable high-frequency linear and tip-tilt movements. PSJ products include Stages and Actuators for positioning and frequency generation, used in microscopy, spectroscopy, laser positioning, 3D scanning, space applications, probes and wafer handling, and autofocus systems. PSJ's team of experts knows everything about motion and we share this passion with our customers. Reliability and excellent performance are the key factors of PSJ's success.
Address
piezosystem jena GmbH
Stockholmer Str. 12
07747 Jena
Germany
Phone: +49 3641 66880
Fax: +49 3641 668866
Internet: www.piezosystem.com
Piezo focus fine adjustment up to 600µm
Resolution 1nm
Parallelogram design with high resonant frequency in kHz range
Parallel motion inside the optical beam
Easy to attach on microscopes
Flexible use on different microscopes and in other optical systems
Cost-effective solution for fine adjustment on the microscope
Available as "upside-down" versions for inverse microscopes
Low Lateral Run-out in X and Y - only motion in the desired direction
Fast triple actuator tilting platform for components up to 50 mm in diameter
Different tilting angles for piezo steering mirror up to 40µm
Plus/minus tilting
kHz resonant frequency up to 1.5 kHz
Sub-µrad resolution
Additional z-axis piston movement
Optional position feedback sensor
Space application tested
Ethernet connection for remote control
PiSoWorks software for comlete piezo control
USB-C interface
Real time SPI interface
Analog interfave
Trigger I/O
400mA peak current
Automatic Sensor Calibration (ASC function)
16bit resolution
Feedback control with adjustable PID or ILC controller
Low-pass filter and slew rate limiter
Arbitrary waveform generator
Data recorder
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