CiS Forschungsinstitut für Mikrosensorik

Booth number 4545-41

CiS Forschungsinstitut für Mikrosensorik is a non-profit research institute and focused on development of silicon technologies for high-quality micro sensors and micro systems.

About us

CiS Forschungsinstitut für Mikrosensorik GmbH was founded in 1993 as a non-profit research institute with close links to industry. Its focus is the development of silicon technologies for high-quality micro sensors and micro systems. Technical properties such as reliability, long-term stability and high accuracy of the micro components are the reasons for the leading position in pressure sensors, radiation detectors and photodiodes.

With specialties such as 3D structuring, stacking technologies and double-sided wafer processing, the CiS Research Institute is one of the technology leaders in the industry. In the fields of optical, micromechanical, piezoresistive sensors and silicon detectors, the CiS particularly supports small and medium-sized enterprises in the development of new innovative products. Based on more than 25 years of "Competence in Silicon", the expertise ranges from research and development to small series production of customer-specific micro components.

CiS Forschungsinstitut für Mikrosensorik
Konrad-Zuse-Str. 14
99099 Erfurt

Phone: +49 361 6631410

Products and services

The CiS Research Institute develops and manufactures MEMS IR emitters for different customer specific applications. Beside different geometries and power classes, we offer innovative solutions for emitters with higher dynamics, improved emissivity and long lifetimes in the application. In addition we offer different solutions for infrared detectors, services for housing, hermetic sealing and assembly and integration in the sensor systems of our customers and development partners.

The CiS Research Institute develops and manufactures high-quality, hermetically sealed housings for LEDs. The assembly of SMD-capable multichip module takes place completely on the wafer level, which - despite the high-quality materials - results in low manufacturing costs. The high thermal conductivity of the base material silicon enables very good heat dissipation of the LED and thus guarantees a long service life. At the same time, the reflector and optical lens triple the usable light.

MEMS IR Emitter

Different assembly steps of a silicon package for an UV-LED

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