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CiS Forschungsinstitut für Mikrosensorik GmbH

Booth number: 4529-52

About us

With state-of-the-art technologies in silicon microsystems and sensors, CiS supports companies in the development of innovations and the launch of new products on industrial markets.

For this purpose, our customers can draw on the expertise and experience of 120 engineers, technologists and skilled workers.
A high level of competence in silicon MEMS wafer processes and assembly technologies, proven interdisciplinary cooperation along the value-added chain and close collaborations with industry distinguish the CiS. In particular, the CiS meets the industry's demand for high-quality sensor components with high reliability even under harsh operating conditions.

Small, medium and large companies use the CiS for joint activities in industrial research, product development and manufacturing in small and medium quantities.

The institute enjoys an international reputation and participates in numerous national initiatives and European networks.

Products and services

In the field of microsystem engineering work is being carried out on the development and manufacturing of components, modules and sensor systems, whose main item in each case is a silicon chip processed with the appropriate technologies. Depending on which physical mechanism of action attention is focused on, microelectronic components can be combined or integrated with micro-mechanical (MEMS) or micro-optical (MOEMS) elements to produce customer-specific solutions.

The relevant activities at CiS are divided between the three business units MEMS, MOEMS and Silicon Detectors.

Reflective Photoplethysmography Sensor

Reflective Photoplethysmography Sensor

Key component of the sensor is an integrated emitter-detector module with up to 4 light sources and a photodetector/-array.

Multi-wavelength UV Module

Multi-wavelength UV Module

A constant light illumination module with three UV LEDs in the wavelengths 245, 265 and 280 nm was developed,to be applied in molecular biology for the absorbance measurement on DNA samples.Special features:
Spectral purity and the beam diameter of less than 4 mm of the emitted light.

The stability of the LED intensities is monitored by UV sensitive diodes and control electronics.

Fast and small spectral sensors for fiber-Bragg gratings

Fast and small spectral sensors for fiber-Bragg gratings

The compact assembly of the detector chips including filters, beam shaping elements, fiber coupler as well as electronics and housing allows a minimum sensor size just slightly larger than an ordinary APC connector. The opto-electronic converter is also available as an SMD component.

News & Innovations

Miniaturized UV-LED lighting with multiple wavelengths  

Manufacturers of measuring devices utilized in bioanalytics and medical technology are now able to build significantly smaller systems and to open up new fields of application by low cost UV LEDs. In two application cases new UV lightings were already tested successfully. A constant light illumin...| » Further reading 

New sensor technologies for tracking changes in blood pressure without cuff 

Worldwide, research and industry are working on health wearables, mobile and barely visible systems, which are capable of recording, analyzing and providing vital parameters to medical professionals for evaluation, under day-to-day conditions and with a high degree of comfort for the patient. Th...| » Further reading 

Fast and small spectral sensors for fiber-Bragg gratings 

With stacked silicon photodiodes and refined optical thin film filters, spectrally sensitive detectors can be developed that can replace conventional, expensive spectrometers needed for special applications. A further feature of such spectral sensors is the elimination of measurement errors cause...| » Further reading 


CiS Forschungsinstitut für Mikrosensorik GmbH
Konrad-Zuse-Str. 14
99099 Erfurt

Phone: +49 361 6631410

Dr. Olaf Brodersen
Director Business Unit MOEMS
Phone: +49 173 3247663

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Aixtooling GmbH
Booth number: 4529-66